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AltiSurf530

Non-Contact Roughness Tester and Profilometer

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Primarily developed for semiconductor applications, the AltiSurf530 is also the foundation for many metrology stations adapted to highly specific customer requirements. Like the AltiSurf500 and 520, it can be fully integrated with all available options.

 

Specifications:

 

AXES:

• X, Y, Z travel (mm): 300 × 300 × 300
  
• DC motorized axis system
  
• Flatness below 2 microns over 300 mm after correction
  
• Maximum speed: up to 40 mm/s
  
• Option: 0.1 micron resolution
  
• Option: dual rotary axis

  

 

 

    

 

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      (Agrandar)