Contact and Non-Contact Profilometry <---                                

AltiSurf®530 - Mechanical Testers  

AltiSurf®530 - Mechanical Testers

 

Primarily Developed for semiconductor applications, the AltiSurf®530 is also the basis for many metrology stations adapted to very specific customer needs. Just like the AltiSurf®500 and 520, it can integrate all kind of sensor and fixturing.

 

Specifications

 

AXES:

  • Length X, Y , Z (mm): 300 × 300 × 300.

  • Motorized DC Axis.

  • Flatness less than 2 .mu.m to 300mm after correction.

  • Max Speed. : up to 40 mm/s.

  • Option: Stepping 0,1 µm.

  • Option: double rotary axis.

 

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